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Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems

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 | #9454398 in Books |  2014-07-21 | Original language:English | PDF # 1 |  9.50 x.84 x6.75l,1.90 | File type: PDF | 439 pages

|| |"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the read

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high fre...

You can specify the type of files you want, for your gadget.Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems   |  From Wiley-VCH. I was recommended this book by a dear friend of mine.

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