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Foundations of MEMS (2nd Edition)
Chang Liu
[PDF.uy29] Foundations of MEMS (2nd Edition)
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| #398780 in Books | 2011-03-14 | Original language:English | PDF # 1 | 9.20 x1.50 x7.60l,2.45 | File type: PDF | 560 pages||2 of 2 people found the following review helpful.| and is a rather good reference book for Electrical Engineers to have handy for ...|By Alexandre Yamamoto|Between reviews from disgruntled students and people who were reviewing the seller rather than the book, let's see if I can squeeze in a (hopefully) impartial review for this book.
The book provides a rather decent review of the mainstream techniques for the desig|About the Author||Chang Liu received his M.S. and Ph.D. degrees from the California Institute of Technology in 1991 and 1995, respectively. His Ph.D. thesis was titled Micromachined sensors and actuators for fluid mechanics applications. In January 1996
For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.
Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorp...
You easily download any file type for your device.Foundations of MEMS (2nd Edition) | Chang Liu. A good, fresh read, highly recommended.