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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications

Marc J. Madou




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 | #715990 in Books |  CRC Press |  2011-06-13 | Original language:English | PDF # 1 |  11.30 x1.10 x8.90l,.0 | File type: PDF | 650 pages

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||About the Author|University of California, Irvine, USA

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with co...

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