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Integrated Circuits: Chemical and Physical Processing (ACS Symposium Series)

From American Chemical Society




[PDF.cq83] Integrated Circuits: Chemical and Physical Processing (ACS Symposium Series)

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 | #11272946 in Books |  1985-10-01 | Original language:English | PDF # 1 |  9.00 x1.00 x6.00l, | File type: PDF | 360 pages

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Explores the complex physical and chemical operations that are designed to build structures or modify properties of materials in very thin films. Covers fundamental phenomena occurring in unit processes used to manufacture integrated circuits. Examines the most significant fundamental manufacturing processes.



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