[PDF.85xa] Materials Issues and Modeling for Device Nanofabrication: Volume 584 (MRS Proceedings)

Materials Issues and Modeling for Device Nanofabrication: Volume 584 (MRS Proceedings)

[PDF.ag97] Materials Issues and Modeling for Device Nanofabrication: Volume 584 (MRS Proceedings)

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 |  Cambridge University Press |  2000-08-04 | Original language:English | PDF # 1 |  8.98 x.83 x5.98l,1.30 | File type: PDF | 362 pages

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The exploding market of information technology requires ultrahigh-speed integrated circuits, which imposes formidable challenges in terms of nanofabrication, advanced materials, atomic-scale measurements and modeling. The enormous costs of next-generation lithographic machines to mass produce integrated circuits with sub-100nm resolution justify alternative approaches where the use of advanced materials and techniques for nanofabrication, including epitaxial growth and t...

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