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MEMS Mechanical Sensors

Steve P. Beeby, Graham Ensel, Michael Kraft




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 | #3883940 in Books |  2004-04-30 |  2004-04-30 | Original language:English | PDF # 1 |  10.00 x.64 x7.00l,1.42 | File type: PDF | 282 pages

||About the Author|Neil White is professor of intelligent sensor systems at the School of Electronics and Computer Science, University of Southampton, U.K. A fellow of the Institution of Electrical Engineers (IEE) and the Institute of Physics (IOP), as well as a s

Here’s the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

This new ...

You can specify the type of files you want, for your gadget.MEMS Mechanical Sensors   |  Steve P. Beeby, Graham Ensel, Michael Kraft. Just read it with an open mind because none of us really know.

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