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Microelectronic Applications of Chemical Mechanical Planarization

From Wiley-Interscience




[PDF.cq28] Microelectronic Applications of Chemical Mechanical Planarization

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 | #2842805 in Books |  2007-10-19 | Original language:English | PDF # 1 |  9.30 x1.70 x6.10l,2.63 | File type: PDF | 734 pages

||0 of 0 people found the following review helpful.| Good CMP book.|By Bing Hu|I am a new graduated college student and just found a CMP engineer position. This book is good for starter to learn CMP. But it doesn't talk too much scientific mechanism. It is still a good book for CMP engineer to keep.|2 of 3 people found the following review helpful.| Enjoy & Feel CMP thoroughly.|By Sung P|From the Back Cover||An authoritative, systematic, and comprehensive description of current CMP technology |Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit

An authoritative, systematic, and comprehensive description of current CMP technology

Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical as...

You easily download any file type for your gadget.Microelectronic Applications of Chemical Mechanical Planarization   |  From Wiley-Interscience. I really enjoyed this book and have already told so many people about it!

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