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| #511135 in Books | Springer | 2004-12-08 | Original language:English | PDF # 1 | 9.21 x1.50 x6.14l,2.49 | File type: PDF | 689 pages | ||3 of 3 people found the following review helpful.| Wonderful book on a complex subject|By I. Gurin|In 23 chapters, Senturia brings together a dizzying array of fields of engineering necessary to design micro-electro-mechanical systems (MEMS) and examples of MEMS products. For instance, he covers Euler beam theory, the Navier-Stokes equation, micromachining, feedback circuits, and electronic noise, and then anchors these topics
It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of ...
You can specify the type of files you want, for your device.Microsystem Design | Stephen D. Senturia. I was recommended this book by a dear friend of mine.
