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Photomask Fabrication Technology (Professional Engineering)

Benjamin G. Eynon, Banqiu Wu




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 | #3181206 in Books |  2005-08-11 | Original language:English | PDF # 1 |  9.10 x1.78 x6.00l,2.03 | File type: PDF | 500 pages

||0 of 0 people found the following review helpful.| Mask Making|By Mark B. Smith|Great intro book on photo-mask, development , manufacturing & history. That said, it needs to be updated.|0 of 0 people found the following review helpful.| feel very good .|By Colbert|Great product. Feels good in the hand. very good . i need it to change , good memory. delivery on time receive it|From the Back Cover|
  • Fabrication processing methods
  • Quality control parameters
  • Resolution enhancement techniques
  • Defect reduction
| Photomask fabrication technologies and applications | A must-have guide for engineers developing ph

Photomasks are defect-free optical templates -- the printing masters for the fabrication of integrated circuits (ICs). When IC feature sizes fall below the exposure tool’s source wavelength, photomask fabrication becomes difficult: very strict mask critical dimension (CD) and feature placement specifications, intensive capital equipment investment, unique raw materials and applications, and special expertise requirements for photomask fabrication technologists are ...

You can specify the type of files you want, for your gadget.Photomask Fabrication Technology (Professional Engineering)   |  Benjamin G. Eynon, Banqiu Wu. A good, fresh read, highly recommended.

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