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Resonant MEMS: Fundamentals, Implementation, and Application (Advanced Micro and Nanosystems)

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 | #2936355 in Books |  2015-06-08 | Original language:English | PDF # 1 |  9.90 x1.10 x6.90l,.0 | File type: PDF | 512 pages

||1 of 1 people found the following review helpful.| If you already work with Resonant MEMS and want some inspiration this might work for you|By Juan Ybarra|I am beginning my PhD program and, I will be working with resonant MEMS devices as a platform for the detection of biomarkers. This book was an okay starting point; it gave me some clues as to where I should look to find more details, but it does not give very much in the way|From the Back Cover|Resonant microelectromechanical systems (MEMS) are characterized by sub-millimeter-sized components that are able to oscillate. Depending on the actuation method, these resonant MEMS are implemented, e.g., as electrostatic, electrothermal, ma

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last p...

You easily download any file type for your gadget.Resonant MEMS: Fundamentals, Implementation, and Application (Advanced Micro and Nanosystems)   |  From Wiley-VCH. Just read it with an open mind because none of us really know.

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