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The Science and Engineering of Microelectronic Fabrication

Stephen A. Campbell




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 | #324693 in Books |  2001-02-15 | Ingredients: Example Ingredients | Original language:English | PDF # 1 |  8.80 x1.40 x7.60l,2.65 | File type: PDF | 624 pages

||0 of 0 people found the following review helpful.| Five Stars|By Luncun Wei|good|0 of 0 people found the following review helpful.| Great for anyone studying micro-fab or material science|By Customer|I used this book throughout the final year of my BS in EE up until completing my PhD. This book is an excellent reference and gives a general overview of most of the processes us|About the Author|Stephen A. Campbell is at University of Minnesota.

Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition, provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this second edition, the text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion imp...

You easily download any file type for your device.The Science and Engineering of Microelectronic Fabrication   |  Stephen A. Campbell. I was recommended this book by a dear friend of mine.

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